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Park NX20

失效分析的理想选择

Park NX20可快速帮助客户找到产品失效的原因，并帮助客户制定出更多具有创意的解决方案。高精密度可为用户带来高分辨率数据，让用户能够更加专注于工作。与此同时，非接触扫描模式让探针针尖更锋利、更耐用，无需为频繁更换探针而耗费大量的时间和金钱。

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缺陷审查成像和大样品分析

Park NX20拥有业界便捷的设计和自动界面，让你在使用时无需花费大量的时间和精力，也不用为此而时时不停的指导初学者。借助这一系列特点，您可以更加专注于解决更为重大的问题，并为客户提供及时且富有洞察力的失效分析报告。

  • 样品侧壁三维结构测量

    NX20的创新架构让您可以检测样品的侧壁和表面，并测量它们的角度。众多的功能和用途正是您的创新性研究和敏锐洞察力所必需的。

    样品侧壁三维结构测量

  • 对样品和基片进行表面光洁度测量

    表面光洁度测量是Park NX20的关键应用之一，能够带来精准的失效分析和质量保证。

    对样品和基片进行表面光洁度测量

  • 高分辨率电子扫描模式

    QuickStep SCM: 超快的扫描式电容显微镜 PinPoint AFM: 无摩擦导电原子力显微镜

    高分辨率电子扫描模式

  • 多种创新且创新的专利技术帮助顾客减少测试时间

    通过对比重复扫描情况下探针尖端的形状变化，您可以轻易看到Park的真正非接触模式的优势所在。 借助真正非接触模式，探针尖端在扫描氮化铬样品（即探针检测样品）200次后仍可保持锋利的状态。氮化铬的表面粗糙且研磨性强，会让普通的探针很快变钝。

    多种创新且创新的专利技术帮助顾客减少测试时间

  • 没有压电蠕变误差的真正样品表面形貌

    超低噪声Z探测器，噪音水平低于0.02 nm,从而达到非常精准样品形貌成像，没有边沿过冲无需校准。Park NX20在为您提供好的数据的同时也为您节省了宝贵的时间。

    没有压电蠕变误差的真正样品表面形貌

2D Flexure-Guided Scanner with 100µm x 100µm Scan Range

The XY scanner consists of symmetrical 2-dimensional flexure and high-force piezoelectric stacks provides high orthogonal movement with minimal out-of-plane motion as well as high responsiveness essential for precise sample scanning in the nanometer scale.

2D Flexure-Guided Scanner with 100µm x 100µm Scan Range

High Speed Z Scanner with 15µm Scan Range

Driven by a high-force piezoelectric stack and guided by a flexure structure, the standard Z scanner has a high resonant frequency of more than 9 kHz (typically 10.5 kHz), and Z-servo speed of more than 48 mm/sec tip velocity which enables accurate feedback. The maximum Z scan range can be extended from 15µm to 30µm with the optional long scan range Z scanner.

High Speed Z Scanner with 15µm Scan Range

Low Noise XYZ Position Sensors

The industry leading low noise Z detector replaces the applied Z voltage as the topography signal. In addition, the low noise XY closed loop scan minimizes the forward and backward scan gap to be less than 0.15% of the scan range.

Low Noise XYZ Position Sensors

Motorized XY Sample Stage with Optional Encoders

The encoders, used on all motorized stages, enable higher positioning repeatability for accurate sample positioning. The encoded XY stage travels in 1 µm resolution with 2 µm repeatability, and the encoded Z stage, in 0.1 μm resolution with 1 μm repeatability.

Motorized XY Sample Stage with Optional Encoders

Step Scan Automation

Using the motorized sample stage, Step-and-Scan enables user-programmable multiple region imaging. This automated feature increases productivity by minimizing user assistance during repetitive imaging processes.

Step-and-Scan process consists of:

  • Scan an image
  • Lift the cantilever
  • Move the motorized stage to a user defined coordinate
  • Approach
  • Repeat the scan

Accessible Sample Holder

The unique head design allows for an open side access to sample and tip. The maximum sample size one can place on the stage is either 150 mm diameter x 20 mm or 200 mm diameter x 20 mm depending on the travel range option chosen for the XY sample stage.

Accessible Sample Holder

Auto Engage by Slide-to-Connect SLD Head

The AFM head quickly slides into place along a dovetail rail, automatically locking and connecting to control electronics with precise positioning. The Super Luminescence Diode (SLD) provides accurate imaging of reflective surfaces and enables precise pico-Newton force-distance measurements, without interference in visible spectrum experiments.

Auto Engage by Slide-to-Connect SLD Head

Direct On-Axis High Powered Optics with Integrated LED Illumination

Custom designed objective lens with a 51 mm ultra long working distance and 0.21 NA offers 1.0 µm resolution and sharp on-axis optical views. The top-down direct view enables easy navigation to target areas. The EL20x objective lens features a 20 mm working distance, 0.42 NA, and 0.7 µm resolution for enhanced vision clarity. A larger CCD sensor and software-controlled LED light ensure a broad field of view and ample illumination for precise sample observation.

Direct On-Axis High Powered Optics with Integrated LED Illumination

Expansion Slot for Advanced SPM Modes and Options

Advanced SPM modes are enabled by simply plugging an option module to the expansion slot. The modular design of the NX-series AFM allows option compatibility throughout its product line.

Expansion Slot for Advanced SPM Modes and Options

Vertically Aligned Motorized Z Stage and Focus Stage

The Z stage and focus stage engage the cantilever with the sample surface while constantly maintaining a clear field of vision for the user. And because the focus stage is motorized and software controlled, it has the precision necessary for transparent samples and liquid cell applications.

Vertically Aligned Motorized Z Stage and Focus Stage

High Speed 24-bit Digital Electronics

The NX-series AFMs utilize a unified NX electronics controller, a 24-bit high-speed digital unit that enhances the accuracy and speed of Park’s True Non-Contact ModeTM. Its low noise and fast processing are perfect for nanoscale imaging and precise electrical measurements, while embedded digital signal processing enhances functionality and value for advanced research.

High Speed 24-bit Digital Electronics
  • 24-bit signal resolution for XY and Z detectors
  • Embedded digital signal processing capability
  • Intergrated signal access ports

Applications

Perfect for Diverse Applications