인라인 계측용 원자현미경

Flat Panel Display

As the demand for Atomic Force Metrology for larger flat panel displays increases, Park NX-Tip Scan Head overcomes nanometrology challenges for samples over 300mm. The Tip Scanning Head and gantry style air-bearing stage allow Park NX-TSH to accurately image roughness measurement, step height measurement, and critical dimension measurement.​ Atomic force microscopy is the most accurate, and non-destructive, method of measuring samples at the nanoscale and with Park NX-TSH, reliable, high-resolution AFM images can be obtained on OLEDs, LCDs, photomasks, and more.