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Park NX20

The Leading Nanometrology Tool for Failure Analysis

Park Systems의 NX20은 디바이스의 결함을 발견하고 독창적인 결과물을 개발하는 것을 좀더 쉽게 하는 고유의 특징들을 갖추고 있으며, 사용자가 NX20이 제공하는 고해상도 데이터로 프로젝트를 더욱 수월하게 해결 할 수 있게 도와줍니다. 또한 NX 20의 완전 비접촉 모드™ 는 팁을 날카롭고 수명을 길게 유지 시켜주기 때문에 장시간 고해상도 스캔이 가능하며 팁을 교체하는데 드는 시간과 비용을 절약 할 수 있습니다.

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Defect Review Imaging and Analysis for Large Sample

Park Systems의 NX20은 다루기 쉬운 디자인 과 자동화 인터페이스를 가지고 있기 때문에 사용자는 장비를 사용하거나 신입 엔지니어를 교육하는데 많은 시간과 에너지를 쓸 필요가 없습니다. 이것은 사용자가 더 큰 문제를 해결하는 것과 고객에게 좀더 정확한 분석 데이터를 제공할 수 있습니다.

  • Sidewall measurements for 3D structure study

    NX20의 획기적인 구조로 인하여 샘플의 측벽과 표면을 탐지하고 각각의 각도를 측정하는 것이 가능합니다. 이것은 사용자가 혁신적이고 깊이있는 연구를 할 수 있도록 도와줍니다.

    Sidewall measurements for 3D structure study

  • Surface Roughness Measurements for Media and Substrates

    표면 거칠기 측정은 NX20의 핵심 기능 중의 하나이며, NX20은 정확한 고장분석과 품질보증을 제공합니다.

    Surface Roughness Measurements for Media and Substrates

  • High Resolution Electrical Scan Mode

    QuickStep SCM: 가장 빠른 전기용량 측정 원자현미경 PinPoint AFM: 마찰이 없는 전도성의 AFM

    High Resolution Electrical Scan Mode

  • Reproduce Best AFM Measurement

    True Non-Contact Mode™는 날카로운 팁을 빠르게 마모시키는 거친 표면을 가진 팁 체크 샘플 CrN을 200회의 측정 이후에도 팁의 끝부분을 날카롭게 유지해줍니다.

    Reproduce Best AFM Measurement

  • True Sample Topography™ without Piezo Creep Error

    Park Systems의 AFM은 가장 효과적인 저 노이즈 Z검출기로 0.02nm이상의 넓은 대역폭은 가집니다. 이는 정확하게 샘플의 형상도를 측정할 수 있으며, 모서리의 측정 오류가 없어 별도의 측정이 필요하지 않습니다. 또한 시간단축을 해주고 더 좋은 정보를 얻을 수 있습니다.

    True Sample Topography™ without Piezo Creep Error

2D Flexure-Guided Scanner with 100µm x 100µm Scan Range

The XY scanner consists of symmetrical 2-dimensional flexure and high-force piezoelectric stacks provides high orthogonal movement with minimal out-of-plane motion as well as high responsiveness essential for precise sample scanning in the nanometer scale.

2D Flexure-Guided Scanner with 100µm x 100µm Scan Range

High Speed Z Scanner with 15µm Scan Range

Driven by a high-force piezoelectric stack and guided by a flexure structure, the standard Z scanner has a high resonant frequency of more than 9 kHz (typically 10.5 kHz), and Z-servo speed of more than 48 mm/sec tip velocity which enables accurate feedback. The maximum Z scan range can be extended from 15µm to 30µm with the optional long scan range Z scanner.

High Speed Z Scanner with 15µm Scan Range

Low Noise XYZ Position Sensors

The industry leading low noise Z detector replaces the applied Z voltage as the topography signal. In addition, the low noise XY closed loop scan minimizes the forward and backward scan gap to be less than 0.15% of the scan range.

Low Noise XYZ Position Sensors

Motorized XY Sample Stage with Optional Encoders

The encoders, used on all motorized stages, enable higher positioning repeatability for accurate sample positioning. The encoded XY stage travels in 1 µm resolution with 2 µm repeatability, and the encoded Z stage, in 0.1 μm resolution with 1 μm repeatability.

Motorized XY Sample Stage with Optional Encoders

Step Scan Automation

Using the motorized sample stage, Step-and-Scan enables user-programmable multiple region imaging. This automated feature increases productivity by minimizing user assistance during repetitive imaging processes.

Step-and-Scan process consists of:

  • Scan an image
  • Lift the cantilever
  • Move the motorized stage to a user defined coordinate
  • Approach
  • Repeat the scan

Accessible Sample Holder

The unique head design allows for an open side access to sample and tip. The maximum sample size one can place on the stage is either 150 mm diameter x 20 mm or 200 mm diameter x 20 mm depending on the travel range option chosen for the XY sample stage.

Accessible Sample Holder

Auto Engage by Slide-to-Connect SLD Head

The AFM head quickly slides into place along a dovetail rail, automatically locking and connecting to control electronics with precise positioning. The Super Luminescence Diode (SLD) provides accurate imaging of reflective surfaces and enables precise pico-Newton force-distance measurements, without interference in visible spectrum experiments.

Auto Engage by Slide-to-Connect SLD Head

Direct On-Axis High Powered Optics with Integrated LED Illumination

Custom designed objective lens with a 51 mm ultra long working distance and 0.21 NA offers 1.0 µm resolution and sharp on-axis optical views. The top-down direct view enables easy navigation to target areas. The EL20x objective lens features a 20 mm working distance, 0.42 NA, and 0.7 µm resolution for enhanced vision clarity. A larger CCD sensor and software-controlled LED light ensure a broad field of view and ample illumination for precise sample observation.

Direct On-Axis High Powered Optics with Integrated LED Illumination

Expansion Slot for Advanced SPM Modes and Options

Advanced SPM modes are enabled by simply plugging an option module to the expansion slot. The modular design of the NX-series AFM allows option compatibility throughout its product line.

Expansion Slot for Advanced SPM Modes and Options

Vertically Aligned Motorized Z Stage and Focus Stage

The Z stage and focus stage engage the cantilever with the sample surface while constantly maintaining a clear field of vision for the user. And because the focus stage is motorized and software controlled, it has the precision necessary for transparent samples and liquid cell applications.

Vertically Aligned Motorized Z Stage and Focus Stage

High Speed 24-bit Digital Electronics

The NX-series AFMs utilize a unified NX electronics controller, a 24-bit high-speed digital unit that enhances the accuracy and speed of Park’s True Non-Contact ModeTM. Its low noise and fast processing are perfect for nanoscale imaging and precise electrical measurements, while embedded digital signal processing enhances functionality and value for advanced research.

High Speed 24-bit Digital Electronics
  • 24-bit signal resolution for XY and Z detectors
  • Embedded digital signal processing capability
  • Intergrated signal access ports

Applications

Perfect for Diverse Applications